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Exposure machine working principle


The exposure machine was a new lithography technology developed from the basics of scanning electron microscopy in the early 1960s. It was widely used in the manufacture of semiconductor circuit boards after the 1970s. The exposure machine, that is, the electronic string exposure machine, is a complex semiconductor processing equipment that integrates electro-optical, mechanical, vacuum, electrical, and computer technologies.
The basic working principle of the exposure machine:
Under the control of a computer, an organic polymer (commonly referred to as an electronic resist or a photoresist) is exposed by a focused electron beam, and the physicochemical properties of the photoresist irradiated by the electron beam change. A well-dissolved or non-soluble region is formed in the solvent to form a fine pattern on the resist. According to the thickness of the circuit board, the exposure energy of the upper and lower light sources is determined. If the energy is insufficient, the circuit board cannot be exposed. If the energy is too high, the circuit board will be overexposed. Therefore, when exposing the circuit board, the energy required by the circuit board must be tested first. Thereby the exposure production of the board is performed.
Advantages of Christie LED exposure machine:
1. Uniformity is over 90%;
2. The resolution of the circuit board can reach 50μm.
3, energy saving 80%, no need to replace the lamp within four years, no cooling water consumption;
4, tight optical combination, so that the parallel half angle of the light source projection is less than 2 °;
5. The exposed area is: 1000mm × 750mm / 1300mm × 750mm / 1500mm × 750mm;
6, the vacuum cover automatically rises to avoid the heavy physical labor of the staff;
7. The LED point-by-point correction system monitors the intensity status of each lighting unit in real time;
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